Implementation of computer-generated holograms using 3D electron beam lithography

A. Palevicius1 , G. Janušas2 , B. Narijauskaite3 , M. Mikolajunas4 , D. Viržonis5

Journal of Vibroengineering, Vol. 11, Issue 3, 2009, p. 407-414.

Copyright © 2009 Vibroengineering This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.
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