Numerical simulation and analysis of the micro electrostatic device

Chin-Chia Liu1

Journal of Vibroengineering, Vol. 14, Issue 4, 2012, p. 1515-1523.
Received 28 June 2012; accepted 4 December 2012; published 31 December 2012

Copyright © 2012 Vibroengineering This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.
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