The squeeze film effect on micro-electromechanical resonators

Shih-Chieh Sun1 , Chi-Wei Chung2 , Chao-Ming Hsu3 , Jao-Hwa Kuang4

Journal of Vibroengineering, Vol. 14, Issue 4, 2012, p. 1486-1493.
Received 28 June 2012; accepted 4 December 2012; published 31 December 2012

Copyright © 2012 Vibroengineering This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.
Creative Commons License