Finite element model of MEMS accelerometer for accurate prediction of dynamic characteristics in biomechanical applications

V. Benevicius1 , V. Ostaševicius2 , M. Venslauskas3 , R. Daukševicius4 , R. Gaidys5

Journal of Vibroengineering, Vol. 13, Issue 4, 2011, p. 803-809.
Received 20 September 2011; accepted 4 December 2011; published 31 December 2011

Copyright © 2011 Vibroengineering This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.
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