Piezo-and pyroelectric GAAS sensors integrated in one crystal with GAAS FET

S. Voronov1 , Y. Poplavko2 , A. Bogorosh3 , A. Bubulis4

Journal of Vibroengineering, Vol. 12, Issue 1, 2010, p. 119-123.
Received 16 December 2009; accepted 3 February 2009; published 31 March 2010

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