Piezo-and pyroelectric GAAS sensors integrated in one crystal with GAAS FET
S. Voronov1 , Y. Poplavko2 , A. Bogorosh3 , A. Bubulis4
Journal of Vibroengineering, Vol. 12, Issue 1, 2010, p. 119-123.
Received 16 December 2009; accepted 3 February 2009; published 31 March 2010
Copyright © 2010 Vibroengineering This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.
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