Study of natural frequency shifting in a MEMS actuator due to viscous air damping modeled by nonlinear reynolds equation

V. Ostasevicius1 , R. Dauksevicius2 , R. Gaidys3

Journal of Vibroengineering, Vol. 10, Issue 3, 2008, p. 388-396.
Received 1 August 2008; accepted 10 September 2008; published 30 September 2008

Copyright © 2008 Vibroengineering This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.
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