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micro-electro-mechanical systems (MEMS); micro-cantilever beam; thermal excitation; harmonic response; resonance vibration
2017-06-30
10.21595/mme.2017.18228
Mathematical Models in Engineering
© 2017 JVE International Ltd. All rights reserved.
2351-5279
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10.21595/mme.2017.18228
https://doi.org/10.21595/mme.2017.18228
doi:10.21595/mme.2017.18228
Aydin Ahrabi
Carlo Menon
Mojtaba Komeili
JVE International Ltd.
micro-electro-mechanical systems (MEMS)
micro-cantilever beam
thermal excitation
harmonic response
resonance vibration
10.21595/mme.2017.18228
2017-06-30
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