Investigation of thermo-elastic damping of vibrations of rectangular and ring-shaped mems resonators

R. Barauskas1 , S. Kausinis2 , H. A. C. Tilmans3

Journal of Vibroengineering, Vol. 11, Issue 1, 2009, p. 177-187.
Received 10 January 2009; accepted 10 March 2009; published 31 March 2009

Copyright © 2009 Vibroengineering This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.
Creative Commons License
This publication is only available via PDF.
Download PDF