Thermaly mechanisms in electrostaticaly actuated microelectromechanical structures

S. Šeržentas1

Journal of Vibroengineering, Vol. 10, Issue 1, 2008, p. 61-64.
Received 8 January 2008; accepted 28 February 2008; published 31 March 2008

Copyright © 2008 Vibroengineering This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.
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