A surface micromachined comb drive with superior stability for application as an actuator

Yanxia Zhang1 , M. Kahrizi2

Journal of Vibroengineering, Vol. 10, Issue 1, 2008, p. 11-17.
Received 13 February 2008; accepted 17 March 2008; published 31 March 2008

Copyright © 2008 Vibroengineering This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.
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