Finite element analysis of thermo-elastical modal damping of mems vibrations

R. Barauskas1 , S. Kaušinis2 , Ingrid de Wolf3 , S. Stoffels4 , H. A. C. Tilmans5

Journal of Vibroengineering, Vol. 9, Issue 2, 2007, p. 21-33.
Received 7 May 2007; accepted 15 June 2007; published 30 June 2007

Copyright © 2007 Vibroengineering This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.
Creative Commons License
This publication is only available via PDF.
Download PDF