2094. Research on a symmetric non‑resonant piezoelectric linear motor

Mengxin Sun1, Yin Wang2, Weiqing Huang3, Qian Lu4

1, 3, 4State Key Laboratory of Mechanics and Control of Mechanical Structures,
Nanjing University of Aeronautics and Astronautics, Nanjing 210016, China

2Huaqiao University, Xiamen, Fujian Province, 361021, China

3Corresponding author

E-mail: 1mxsun@nuaa.edu.cn, 2mehwq@nuaa.edu.cn, 3wangyin_0816@live.cn, 4155381343@qq.com

Received 2 November 2015; received in revised form 20 May 2016; accepted 28 June 2016

DOI https://doi.org/10.21595/jve.2016.16599

Abstract. Nowadays, piezoelectric linear actuators draw wide attention of researchers around world as its advantages of simple structure, high precision and rapid response. To improve the performance of the non-resonant piezoelectric motor, a symmetric piezoelectric linear motor driven by double-foot is studied in the paper. The vibration model of the stator is established based on the structure and the working mechanism of motor. Then guide mechanism and preload device is designed and a prototype is fabricated to verify the feasibility of structure. The performances of motor under different driving signal are tested in experiment. By applying three-phase square‑triangular waves signal and four-phase sine waves signal of peak to peak value 100 V with 50 V offset and frequency of 100 Hz, the speed of prototype reaches 733 μm/s and 667 μm/s and the maximum thrust is 8.34 N and 6.31 N respectively.

Keywords: piezoelectric linear motor, performance comparison, piezoelectric stack.


[1]        Yoon M., Khansur N. H., Lee K., Park Y. M. Compact size ultrasonic linear motor using a dome shaped piezoelectric actuator. Journal of Electroceramics, Vol. 28, Issues 2‑3, 2012, p. 123‑131.

[2]        Shi Y. L., Li Y. B., Zhao C. S. Optimum design of a linear ultrasonic motor based on in-plane modes. Proceedings of the CSEE, Vol. 28, Issue 30, 2008, p. 56‑60.

[3]        Li J., Sedaghati R., Dargahi J., Waechter D. Design and development of a new piezoelectric linear inchworm (R) actuator. Mechatronics, Vol. 15, Issue 6, 2005, p. 651‑681.

[4]        Chen Q. F., Yao D. J., Kim C. J., Carman G. P. Mesoscale actuator device: micro interlocking mechanism to transfer macro load. Sensors and Actuators A-Physical, Vol. 73, Issues 1‑2, 1999, p. 30‑36.

[5]        Renner C., Niedermann P., Kent A. D., Fischer O. A vertical piezoelectric inertial slider. Review of Scientific Instruments, Vol. 61, Issue 3, 1990, p. 965‑967.

[6]        Uchino K. Piezoelectric ultrasonic motors: overview. Smart Materials and Structures, Vol. 7, Issue 3, 1998, p. 273‑285.

[7]        Tounsi N., Mestiri R., Keirsbulck L., Ouallin H., Hanchi S., Aloui F. Experimental study of flow control on bluff body using piezoelectric actuators. Journal of Applied Fluid Mechanics, Vol. 9, Issue 22, 2016, p. 827‑838.

[8]        Bekiroglu E. Ultrasonic motors: Their models, drives, controls and applications. Journal of Electroceramics, Vol. 20, Issues 3‑4, 2008, p. 277‑286.

[9]        Wallaschek J. Contact mechanics of piezoelectric ultrasonic motors. Smart Materials and Structures, Vol. 7, Issue 3, 1998, p. 369‑381.

[10]     Lu F., Lee H. P., Lim S. P. Contact modeling of viscoelastic friction layer of traveling wave ultrasonic motors. Smart Materials and Structures, Vol. 10, Issue 2, 2001, p. 314‑320.

[11]     Le Moal P., Cusin P. Optimization of travelling wave ultrasonic motors using a three-dimensional analysis of the contact mechanism at the stator-rotor interface. European Journal of Mechanics A‑Solids, Vol. 18, Issue 6, 1999, p. 1061‑1084.

[12]     Liu Y., Chen W., Xu D., Feng P., Liu J. Improvement of a rectangle-shape linear piezoelectric motor with four driving feet. Ceramics International, Vol. 4, Issue 11, 2015, p. 594‑601.

[13]     Asumi K., Fukunaga R., Fujimura T., Kurosawa M. K. Miniaturization of a V-shape transducer ultrasonic motor. Japanese Journal of Applied Physics, Vol. 48, 2009.

[14]     Flynn A. M. Performance of ultrasonic mini-motors using design of experiments. Smart Materials and Structures, Vol. 7, Issue 3, 1998, p. 286‑294.

[15]     Zhou S., Zhao C., Huang W. Contact analysis of traveling wave type rotary ultrasonic motor in space domain. Proceedings of the CSEE, Vol. 30, Issue 12, 2010, p. 63‑68.

[16]     Takahashi S. Multilayer piezoelectric ceramic actuators and their applications. Japanese Journal of Applied Physics, Supplement, Vol. 24, 1985, p. 41‑45.

[17]     Shi Y. L., Zhao C. S. A new standing-wave-type linear ultrasonic motor based on in-plane modes. Ultrasonics, Vol. 51, Issue 4, 2011, p. 397‑404.

[18]     Mynderse J. A., Chiu G. T. C. Modeling of a dynamic mirror with antagonistic piezoelectric stack actuation. Journal of Dynamic Systems, Measurement, and Control, Vol. 136, Issue 2, 2014, p. 24501.

[19]     Huang H., Zhao H., Fan Z., Zhang H., Ma Z., Yang Z. Analysis and experiments of a novel and compact 3-DOF precision positioning platform. Journal of Mechanical Science and Technology, Vol. 27, Issue 11, 2013, p. 3347‑3356.

[20]     Shupeng W., Zhihui Z., Luquan R., Hongwei Z., Yunhong L., Bing Z. Design and driving characteristic researches of a novel bionic stepping piezoelectric actuator with large load capacity based on clamping blocks. Microsystem Technologies, Vol. 21, Issue 8, 2015, p. 1757‑1765.

[21]     Kim J., Lee J. H. Self-moving cell linear motor using piezoelectric stack actuators. Smart Materials and Structures, Vol. 14, Issue 5, 2005, p. 934‑940.

[22]     Hunstig M., Hemsel T., Sextro W. Stick-slip and slip-slip operation of piezoelectric inertia drives Part II: frequency-limited excitation. Sensors and Actuators A-Physical, Vol. 200, 2013, p. 79‑89.

[23]     Hunstig M., Hemsel T., Sextro W. Stick-slip and slip-slip operation of piezoelectric inertia drives. Part I: ideal excitation. Sensors and Actuators A-Physical, Vol. 200, 2013, p. 90‑100.

[24]     Liu W. H., Wang Y., Huang W. Q., Ding Q. J. A linear stepping piezoelectric motor using inertial impact driving. Applied Mechanics and Materials, Vols. 226‑228, 2012, p. 693‑696.

[25]     Pan S., Huang W. Q., Wang Y., Zhao C. S. High efficiency driving of linear motor based on piezoelectric actuator. Optics and Precision Engineering, Vol. 19, Issue 10, 2011, p. 2464‑2471.

Cite this article

Sun Mengxin, Wang Yin, Huang Weiqing, Lu Qian Research on a symmetric non‑resonant piezoelectric linear motor. Journal of Vibroengineering, Vol. 18, Issue 5, 2016, p. 2916‑2925.


JVE International Ltd. Journal of Vibroengineering. Aug 2016, Vol. 18, Issue 5. ISSN 1392-8716